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Speedfam Parts

Spare Parts:

Keeping your SpeedFam machines running at their peak performance requires OEM parts. For this reason we offer all the components originally installed on your machine. Using parts made to the original specifications will assure the quality production you have come to rely on from your SpeedFam Machines. For information or questions on spare parts, please contact us at

Speedfam Service

Field Service:

SpeedFam Guard Retrofit

Maintenance of your SpeedFam Machine is critical to its proper performance, capabilities and your bottom line. Our factory-trained technicians can perform routine inspections and provide preventive maintenance to keep your system in top operating condition. We offer full services to repair or re-build an entire machine, drive cluster or precision pneumatic systems in the field. These packages are designed to get your machine up and running properly with minimal downtime and cost.


We  offer upgrades to enhance the performance of older machines including conversions from a manual controlled machine to a PLC and HMI controls, or upgrading an old PLC or Touch Screen with new controls and features that will enhance the performance of you existing machine. 


We also offer replacement of your existing (ATC) Auto Thickness Control box from Sony with a new ATC box with a simpler and easier to use design that can be replaced by your own staff in minutes.


Safety Guarding can be added to meet current OSHA safety compliance for most existing SpeedFam machines. 

Call to find out more about upgrades and retrofits for your existing machine with choices and packages that fit your needs and budget. Call: (847)499-3400 or email:

Upgrades,Retro Fits and Enhancements:

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